Over the last 10 years, understanding of mechanical properties of thin film material has been essential for improving life-time operations of microelectromechanical systems (MEMS). Alt… Mehr…
Over the last 10 years, understanding of mechanical properties of thin film material has been essential for improving life-time operations of microelectromechanical systems (MEMS). Although, properties of bulk materials might be well characterized, thin-film properties are considerably different from those of the bulk. It cannot be assumed that mechanical properties using bulk specimens will apply to the same materials when used as a thin film. For many microelectronic thin films, material properties depend strongly on the details of the deposition processes and the growth conditions on its substrate. Temperature dependence of a MEMS switch gold thin film membrane on the pull down voltage as the temperature is varied from room temperature (300 K) to cryogenic temperature (10 K) is determined with RF MEMS shunt switches. The switch is composed of a gold coplanar waveguide structure with a gold bridge membrane suspended above an area of the center conductor which is covered by a dielectric (BaTiO3). The gold membrane is actuated by an electrostatic force acting between the transmission line and the membrane when a voltage is applied. Buch (dtsch.) Noel Julien Taschenbuch, VDM, 03.11.2008, VDM, 2008<
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Over the last 10 years, understanding of mechanicalproperties of thin film material has been essentialfor improving life-time operations ofmicroelectromechanical systems (MEMS). Although,… Mehr…
Over the last 10 years, understanding of mechanicalproperties of thin film material has been essentialfor improving life-time operations ofmicroelectromechanical systems (MEMS). Although,properties of bulk materials might be wellcharacterized, thin-film properties are considerablydifferent from those of the bulk. It cannot beassumed that mechanical properties using bulkspecimens will apply to the same materials when usedas a thin film. For many microelectronicthin films, material properties depend strongly onthe details of the deposition processes and thegrowth conditions on its substrate.Temperature dependence of a MEMS switch gold thinfilm membrane on the pull down voltage as thetemperature is varied from room temperature(300 K) to cryogenic temperature (10 K) isdetermined with RF MEMS shunt switches. The switchis composed of a gold coplanar waveguide structurewith a gold bridge membrane suspended above an areaof the center conductor which is covered by adielectric (BaTiO3). The gold membrane is actuatedby an electrostatic force acting between thetransmission line and the membrane when a voltage isapplied. Bücher / Naturwissenschaften, Medizin, Informatik & Technik / Technik, [PU: VDM Verlag Dr. Müller, Saarbrücken]<
Over the last 10 years, understanding of mechanical properties of thin film material has been essential for improving life-time operations of microelectromechanical systems (MEMS). Althou… Mehr…
Over the last 10 years, understanding of mechanical properties of thin film material has been essential for improving life-time operations of microelectromechanical systems (MEMS). Although, properties of bulk materials might be well characterized, thin-film properties are considerably different from those of the bulk. It cannot be assumed that mechanical properties using bulk specimens will apply to the same materials when used as a thin film. For many microelectronic thin films, material properties depend strongly on the details of the deposition processes and the growth conditions on its substrate. Temperature dependence of a MEMS switch gold thin film membrane on the pull down voltage as the temperature is varied from room temperature (300 K) to cryogenic temperature (10 K) is determined with RF MEMS shunt switches. The switch is composed of a gold coplanar waveguide structure with a gold bridge membrane suspended above an area of the center conductor which is covered by a dielectric (BaTiO3). The gold membrane is actuated by an electrostatic force acting between the transmission line and the membrane when a voltage is applied. Livre - Livre, [PU: VDM Verlag Dr. Müller, Saarbrücken]<
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*Temperature Dependence of Actuated Membranes for RF MEMS Switches* - Applications for thin film materials in a cryogenicenvironment / Taschenbuch für 48.99 € / Aus dem Bereich: Bücher, W… Mehr…
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Applications for thin film materials in a cryogenicenvironment Applications for thin film materials in a cryogenicenvironment Buch (fremdspr.) Bücher>Sachbücher>Naturwissenschaften & Tech… Mehr…
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Over the last 10 years, understanding of mechanical properties of thin film material has been essential for improving life-time operations of microelectromechanical systems (MEMS). Alt… Mehr…
Over the last 10 years, understanding of mechanical properties of thin film material has been essential for improving life-time operations of microelectromechanical systems (MEMS). Although, properties of bulk materials might be well characterized, thin-film properties are considerably different from those of the bulk. It cannot be assumed that mechanical properties using bulk specimens will apply to the same materials when used as a thin film. For many microelectronic thin films, material properties depend strongly on the details of the deposition processes and the growth conditions on its substrate. Temperature dependence of a MEMS switch gold thin film membrane on the pull down voltage as the temperature is varied from room temperature (300 K) to cryogenic temperature (10 K) is determined with RF MEMS shunt switches. The switch is composed of a gold coplanar waveguide structure with a gold bridge membrane suspended above an area of the center conductor which is covered by a dielectric (BaTiO3). The gold membrane is actuated by an electrostatic force acting between the transmission line and the membrane when a voltage is applied. Buch (dtsch.) Noel Julien Taschenbuch, VDM, 03.11.2008, VDM, 2008<
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Over the last 10 years, understanding of mechanicalproperties of thin film material has been essentialfor improving life-time operations ofmicroelectromechanical systems (MEMS). Although,… Mehr…
Over the last 10 years, understanding of mechanicalproperties of thin film material has been essentialfor improving life-time operations ofmicroelectromechanical systems (MEMS). Although,properties of bulk materials might be wellcharacterized, thin-film properties are considerablydifferent from those of the bulk. It cannot beassumed that mechanical properties using bulkspecimens will apply to the same materials when usedas a thin film. For many microelectronicthin films, material properties depend strongly onthe details of the deposition processes and thegrowth conditions on its substrate.Temperature dependence of a MEMS switch gold thinfilm membrane on the pull down voltage as thetemperature is varied from room temperature(300 K) to cryogenic temperature (10 K) isdetermined with RF MEMS shunt switches. The switchis composed of a gold coplanar waveguide structurewith a gold bridge membrane suspended above an areaof the center conductor which is covered by adielectric (BaTiO3). The gold membrane is actuatedby an electrostatic force acting between thetransmission line and the membrane when a voltage isapplied. Bücher / Naturwissenschaften, Medizin, Informatik & Technik / Technik, [PU: VDM Verlag Dr. Müller, Saarbrücken]<
Over the last 10 years, understanding of mechanical properties of thin film material has been essential for improving life-time operations of microelectromechanical systems (MEMS). Althou… Mehr…
Over the last 10 years, understanding of mechanical properties of thin film material has been essential for improving life-time operations of microelectromechanical systems (MEMS). Although, properties of bulk materials might be well characterized, thin-film properties are considerably different from those of the bulk. It cannot be assumed that mechanical properties using bulk specimens will apply to the same materials when used as a thin film. For many microelectronic thin films, material properties depend strongly on the details of the deposition processes and the growth conditions on its substrate. Temperature dependence of a MEMS switch gold thin film membrane on the pull down voltage as the temperature is varied from room temperature (300 K) to cryogenic temperature (10 K) is determined with RF MEMS shunt switches. The switch is composed of a gold coplanar waveguide structure with a gold bridge membrane suspended above an area of the center conductor which is covered by a dielectric (BaTiO3). The gold membrane is actuated by an electrostatic force acting between the transmission line and the membrane when a voltage is applied. Livre - Livre, [PU: VDM Verlag Dr. Müller, Saarbrücken]<
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*Temperature Dependence of Actuated Membranes for RF MEMS Switches* - Applications for thin film materials in a cryogenicenvironment / Taschenbuch für 48.99 € / Aus dem Bereich: Bücher, W… Mehr…
*Temperature Dependence of Actuated Membranes for RF MEMS Switches* - Applications for thin film materials in a cryogenicenvironment / Taschenbuch für 48.99 € / Aus dem Bereich: Bücher, Wissenschaft, Technik Medien > Bücher nein Buch (kartoniert) Hardcover;Naturwissenschaften, Medizin, Informatik, Technik;Technik, VDM Verlag Dr. Müller<
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Over the last 10 years, understanding of mechanical
properties of thin film material has been essential
for improving life-time operations of
microelectromechanical systems (MEMS). Although,
properties of bulk materials might be well
characterized, thin-film properties are considerably
different from those of the bulk. It cannot be
assumed that mechanical properties using bulk
specimens will apply to the same materials when used
as a thin film. For many microelectronic
thin films, material properties depend strongly on
the details of the deposition processes and the
growth conditions on its substrate.
Temperature dependence of a MEMS switch gold thin
film membrane on the pull down voltage as the
temperature is varied from room temperature
(300 K) to cryogenic temperature (10 K) is
determined with RF MEMS shunt switches. The switch
is composed of a gold coplanar waveguide structure
with a gold bridge membrane suspended above an area
of the center conductor which is covered by a
dielectric (BaTiO3). The gold membrane is actuated
by an electrostatic force acting between the
transmission line and the membrane when a voltage is
applied.
Detailangaben zum Buch - Temperature Dependence of Actuated Membranes for RF MEMS Switches
EAN (ISBN-13): 9783639080636 ISBN (ISBN-10): 3639080637 Taschenbuch Erscheinungsjahr: 2008 Herausgeber: VDM Verlag Dr. Müller 88 Seiten Gewicht: 0,147 kg Sprache: ger/Deutsch
Buch in der Datenbank seit 2009-03-12T20:09:23+01:00 (Zurich) Detailseite zuletzt geändert am 2023-05-17T14:13:47+02:00 (Zurich) ISBN/EAN: 3639080637
ISBN - alternative Schreibweisen: 3-639-08063-7, 978-3-639-08063-6 Alternative Schreibweisen und verwandte Suchbegriffe: Autor des Buches: julien, noel tyl Titel des Buches: thin film, temperature, membranes
